Helping The others Realize The Advantages Of Noohapou
Helping The others Realize The Advantages Of Noohapou
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The POU3500 technique features dynamic temperature Charge of the procedure chamber cathode / electrode / anode and can be synchronized with any etch process.
thirty% of its peak electricity use, featuring our consumers major reduction in working expenses and enhanced reliability.
Along with the POU3500, it is possible to achieve unprecedented ends in etch functionality, chamber uptime, diminished expense of possession and fab House utilization – all while improving your procedure trustworthiness.
initially Launched in 1985, our business has developed into a recognized leader in offering temperature Handle methods to the global semiconductor field.
This extraordinary program, giving a small type element, affordable-of-Ownership and Dynamic Temperature Regulate available system and machines engineers a whole new Instrument to optimize their temperature sensitive processes.
we're guided within our belief that prosperity On this aggressive marketplace stems from giving prospects with remarkably engineered new merchandise and world course customer service.
The precision of your POU 3500 allows for impartial control of the procedure fluid temperature on the wafer chuck inside of +/- 0.one °C of established issue, and the fast response time on the technique will allow for maximum wafer-to-wafer repeatability more info throughout the etch method.
Using the POU3300, it is possible to obtain unprecedented results in etch effectiveness, chamber uptime, diminished cost of ownership and fab Room utilization – all even though increasing your method trustworthiness.
The data pertains into a 300mm chamber temperature profile throughout a significant component ratio Etch procedure, functioning at very higher RF energy ailments (~three.8kW). The compelling components of this data set are:
LAUDA-Noah is Conference these new issues and it has incorporated Strength saving technologies in systems that happen to be welcoming to your setting and also have a low priced to work.
The TEs' can swap straight from heating to cooling, or visa-versa. they could switch on & off though inside the heating or cooling manner and might increase or decrease the level of heating or cooling with no switching whatsoever.
The POU3300 process gives dynamic temperature Charge of the procedure chamber cathode / electrode / anode and may be synchronized with any etch approach.
Confirmed; TEs' symbolize just one Component of a chiller's style. The switching & Command procedures used by a chiller will influence the TEs' dependability.
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We demand a lot less cooling/heating capacity for a similar application as a static TCU due to our smaller reservoir quantity.
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